Ionwerks :: time of flight instrumentation & electronics
News
Products
Publications
Company Info
Contact
Links

msri Tutorial

Mass Spectrometry of Recoiled Ions

msri is capable of high-resolution surface analysis at high ambient pressures, making it well suited for real-time, in-situ analysis of film growth processes. The msri process reveals elemental, not molecular ions, and allows for quantitative measurements of surface composition. Advantages of msri include the ability to detect all elements (including H, D, and He), enhance sensitivity for low mass ions, distinguish different phases of films during growth, and measure the relative surface concentration of isotopes.

 


sims




msri



 

sims Secondary Ion Mass Spectrometry

The incoming ion sputters atomic and molecular particles from the surface. A few of the sputtered particles will be ions. These ions (secondary ions) are analyzed in a mass spectrometer

 

msri Mass Spectrometry of Recoiled Ions

The incoming ion has a direct and hard collision with some particles close to the surface (black), whereby a much larger amount of the incident ion's energy is transferred. Hence, this direct recoil ion has much higher energies as in the case of sims. It can reach the mass spectrometer even in poor vacuum.

 

 

 

 
Address
Voice

Email
 
1604 Bissonnet Street, Houston, TX 77005 USA
713 522-9880

info@ionwerks.com
 
Ionwerks and its logo are registered trademarks. Information is subject to change without prior notice.
web site design by cccengineering